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A vibration suppression approach to high-speed atomic force microscopy

I. Soltani Bozchalooi, Kamal Youcef-Toumi, Daniel J. Burns, Georg Ernest Fantner. A vibration suppression approach to high-speed atomic force microscopy. In American Control Conference, ACC 2012, Montreal, QC, Canada, June 27-29, 2012. pages 3797-3802, IEEE, 2012. [doi]

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