A multiscale systems approach to microelectronic processes

Richard D. Braatz, Richard C. Alkire, Edmund G. Seebauer, Timothy O. Drews, Effendi Rusli, Mohan Karulkar, Feng Xue, Yan Qin, Michael Y. L. Jung, Rudiyanto Gunawan. A multiscale systems approach to microelectronic processes. Computers & Chemical Engineering, 30(10-12):1643-1656, 2006. [doi]

@article{BraatzASDRKXQJG06,
  title = {A multiscale systems approach to microelectronic processes},
  author = {Richard D. Braatz and Richard C. Alkire and Edmund G. Seebauer and Timothy O. Drews and Effendi Rusli and Mohan Karulkar and Feng Xue and Yan Qin and Michael Y. L. Jung and Rudiyanto Gunawan},
  year = {2006},
  doi = {10.1016/j.compchemeng.2006.05.022},
  url = {http://dx.doi.org/10.1016/j.compchemeng.2006.05.022},
  tags = {C++, systematic-approach},
  researchr = {https://researchr.org/publication/BraatzASDRKXQJG06},
  cites = {0},
  citedby = {0},
  journal = {Computers & Chemical Engineering},
  volume = {30},
  number = {10-12},
  pages = {1643-1656},
}