Richard D. Braatz, Richard C. Alkire, Edmund G. Seebauer, Timothy O. Drews, Effendi Rusli, Mohan Karulkar, Feng Xue, Yan Qin, Michael Y. L. Jung, Rudiyanto Gunawan. A multiscale systems approach to microelectronic processes. Computers & Chemical Engineering, 30(10-12):1643-1656, 2006. [doi]
Abstract is missing.