A multiscale systems approach to microelectronic processes

Richard D. Braatz, Richard C. Alkire, Edmund G. Seebauer, Timothy O. Drews, Effendi Rusli, Mohan Karulkar, Feng Xue, Yan Qin, Michael Y. L. Jung, Rudiyanto Gunawan. A multiscale systems approach to microelectronic processes. Computers & Chemical Engineering, 30(10-12):1643-1656, 2006. [doi]

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