Dirk Bräuer, Andreas Rehkopf. Online Management and Control System for growing of monocrystal semiconductor materials in multi-zone furnaces. In Proceedings of 13th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2008, September 15-18, 2008, Hamburg, Germany. pages 1072-1075, IEEE, 2008. [doi]
@inproceedings{BrauerR08,
title = {Online Management and Control System for growing of monocrystal semiconductor materials in multi-zone furnaces},
author = {Dirk Bräuer and Andreas Rehkopf},
year = {2008},
doi = {10.1109/ETFA.2008.4638527},
url = {http://dx.doi.org/10.1109/ETFA.2008.4638527},
tags = {control systems},
researchr = {https://researchr.org/publication/BrauerR08},
cites = {0},
citedby = {0},
pages = {1072-1075},
booktitle = {Proceedings of 13th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2008, September 15-18, 2008, Hamburg, Germany},
publisher = {IEEE},
}