Dirk Bräuer, Andreas Rehkopf. Online Management and Control System for growing of monocrystal semiconductor materials in multi-zone furnaces. In Proceedings of 13th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2008, September 15-18, 2008, Hamburg, Germany. pages 1072-1075, IEEE, 2008. [doi]
Abstract is missing.