Pneumatic Driven Positioning and Alignment System for the Assembly of Hybrid Microsystems

Christian Brecher, Martin Freundt, Christian Wenzel. Pneumatic Driven Positioning and Alignment System for the Assembly of Hybrid Microsystems. In Svetan M. Ratchev, editor, Precision Assembly Technologies and Systems, 5th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2010, Chamonix, France, February 14-17, 2010. Proceedings. Volume 315 of IFIP, pages 151-158, Springer, 2010. [doi]

Abstract

Abstract is missing.