Ultra-dense co-integration of FeFETs and CMOS logic enabling very-fine grained Logic-in-Memory

Evelyn T. Breyer, Halid Mulaosmanovic, Jens Trommer, Thomas Melde, Stefan D√ľnkel, Martin Trentzsch, Sven Beyer, Thomas Mikolajick, Stefan Slesazeck. Ultra-dense co-integration of FeFETs and CMOS logic enabling very-fine grained Logic-in-Memory. In 49th European Solid-State Device Research Conference, ESSDERC 2019, Cracow, Poland, September 23-26, 2019. pages 118-121, IEEE, 2019. [doi]

Abstract

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