Martin van den Brink, Anthony Yen, Paul van Wijnen, Michael Lercel, Boudewijn Sluijk. Holistic Patterning to Advance Semiconductor Manufacturing in the 2020s and Beyond. In IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022. pages 3-7, IEEE, 2022. [doi]
Abstract is missing.