A Methodology for Evaluating the Technological Maturity of Micro and Nano Fabrication Processes

Emmanuel Brousseau, Richard Barton, Stefan Dimov, Samuel Bigot. A Methodology for Evaluating the Technological Maturity of Micro and Nano Fabrication Processes. In Svetan M. Ratchev, editor, Precision Assembly Technologies and Systems, 5th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2010, Chamonix, France, February 14-17, 2010. Proceedings. Volume 315 of IFIP, pages 329-336, Springer, 2010. [doi]

Authors

Emmanuel Brousseau

This author has not been identified. Look up 'Emmanuel Brousseau' in Google

Richard Barton

This author has not been identified. Look up 'Richard Barton' in Google

Stefan Dimov

This author has not been identified. Look up 'Stefan Dimov' in Google

Samuel Bigot

This author has not been identified. Look up 'Samuel Bigot' in Google