Emmanuel Brousseau, Richard Barton, Stefan Dimov, Samuel Bigot. A Methodology for Evaluating the Technological Maturity of Micro and Nano Fabrication Processes. In Svetan M. Ratchev, editor, Precision Assembly Technologies and Systems, 5th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2010, Chamonix, France, February 14-17, 2010. Proceedings. Volume 315 of IFIP, pages 329-336, Springer, 2010. [doi]
Abstract is missing.