Control issues for MEMS

Janusz Bryzek, Eric Abbott, Anthony Flannery, David Cagle, Jacek Maitan. Control issues for MEMS. In 42nd IEEE Conference on Decision and Control, CDC 2003, Maui, Hawaii, USA, December 9-12, 2003. pages 3039-3047, IEEE, 2003. [doi]

Abstract

Abstract is missing.