A Versatile Instrument for the Characterization of Capacitive Micro- and Nanoelectromechanical Systems

Cesare Buffa, Alessandro Tocchio, Giacomo Langfelder. A Versatile Instrument for the Characterization of Capacitive Micro- and Nanoelectromechanical Systems. IEEE T. Instrumentation and Measurement, 61(7):2012-2021, 2012. [doi]

@article{BuffaTL12,
  title = {A Versatile Instrument for the Characterization of Capacitive Micro- and Nanoelectromechanical Systems},
  author = {Cesare Buffa and Alessandro Tocchio and Giacomo Langfelder},
  year = {2012},
  doi = {10.1109/TIM.2012.2182866},
  url = {http://dx.doi.org/10.1109/TIM.2012.2182866},
  researchr = {https://researchr.org/publication/BuffaTL12},
  cites = {0},
  citedby = {0},
  journal = {IEEE T. Instrumentation and Measurement},
  volume = {61},
  number = {7},
  pages = {2012-2021},
}