A Versatile Instrument for the Characterization of Capacitive Micro- and Nanoelectromechanical Systems

Cesare Buffa, Alessandro Tocchio, Giacomo Langfelder. A Versatile Instrument for the Characterization of Capacitive Micro- and Nanoelectromechanical Systems. IEEE T. Instrumentation and Measurement, 61(7):2012-2021, 2012. [doi]

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