A Versatile Instrument for the Characterization of Capacitive Micro- and Nanoelectromechanical Systems

Cesare Buffa, Alessandro Tocchio, Giacomo Langfelder. A Versatile Instrument for the Characterization of Capacitive Micro- and Nanoelectromechanical Systems. IEEE T. Instrumentation and Measurement, 61(7):2012-2021, 2012. [doi]

Abstract

Abstract is missing.