Extracting the relative dielectric constant for high-kappa layers from CV measurements - Errors and error propagation

Octavian Buiu, Steve Hall, O. Engstrom, B. Raeissi, M. Lemme, P. K. Hurley, K. Cherkaoui. Extracting the relative dielectric constant for high-kappa layers from CV measurements - Errors and error propagation. Microelectronics Reliability, 47(4-5):678-681, 2007. [doi]

Authors

Octavian Buiu

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Steve Hall

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O. Engstrom

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B. Raeissi

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M. Lemme

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P. K. Hurley

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K. Cherkaoui

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