Florin Burcea, Andreas Herrmann, Bing Li, Helmut Graeb. MEMS-IC Optimization Considering Design Parameters and Manufacturing Variation from both Mechanical and Electrical Side. In 25th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2018, Bordeaux, France, December 9-12, 2018. pages 625-628, IEEE, 2018. [doi]
Abstract is missing.