MEMS-IC Robustness Optimization Considering Electrical and Mechanical Design and Process Parameters

Florin Burcea, Andreas Herrmann, Bing Li, Helmut Graeb. MEMS-IC Robustness Optimization Considering Electrical and Mechanical Design and Process Parameters. ACM Trans. Design Autom. Electr. Syst., 24(4), 2019. [doi]

Authors

Florin Burcea

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Andreas Herrmann

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Bing Li

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Helmut Graeb

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