Florin Burcea, Andreas Herrmann, Bing Li, Helmut Graeb. MEMS-IC Robustness Optimization Considering Electrical and Mechanical Design and Process Parameters. ACM Trans. Design Autom. Electr. Syst., 24(4), 2019. [doi]
@article{BurceaHLG19,
title = {MEMS-IC Robustness Optimization Considering Electrical and Mechanical Design and Process Parameters},
author = {Florin Burcea and Andreas Herrmann and Bing Li and Helmut Graeb},
year = {2019},
doi = {10.1145/3325068},
url = {https://doi.org/10.1145/3325068},
researchr = {https://researchr.org/publication/BurceaHLG19},
cites = {0},
citedby = {0},
journal = {ACM Trans. Design Autom. Electr. Syst.},
volume = {24},
number = {4},
}