MEMS-IC Robustness Optimization Considering Electrical and Mechanical Design and Process Parameters

Florin Burcea, Andreas Herrmann, Bing Li, Helmut Graeb. MEMS-IC Robustness Optimization Considering Electrical and Mechanical Design and Process Parameters. ACM Trans. Design Autom. Electr. Syst., 24(4), 2019. [doi]

Abstract

Abstract is missing.