Haogang Cai, Zhuoqing Yang, Guifu Ding, Xiaolin Zhao. Fabrication of a MEMS inertia switch on quartz substrate and evaluation of its threshold acceleration. Microelectronics Journal, 39(9):1112-1119, 2008. [doi]
@article{CaiYDZ08,
title = {Fabrication of a MEMS inertia switch on quartz substrate and evaluation of its threshold acceleration},
author = {Haogang Cai and Zhuoqing Yang and Guifu Ding and Xiaolin Zhao},
year = {2008},
doi = {10.1016/j.mejo.2008.01.068},
url = {http://dx.doi.org/10.1016/j.mejo.2008.01.068},
researchr = {https://researchr.org/publication/CaiYDZ08},
cites = {0},
citedby = {0},
journal = {Microelectronics Journal},
volume = {39},
number = {9},
pages = {1112-1119},
}