Fabrication of a MEMS inertia switch on quartz substrate and evaluation of its threshold acceleration

Haogang Cai, Zhuoqing Yang, Guifu Ding, Xiaolin Zhao. Fabrication of a MEMS inertia switch on quartz substrate and evaluation of its threshold acceleration. Microelectronics Journal, 39(9):1112-1119, 2008. [doi]

Abstract

Abstract is missing.