A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures

X. Cai, H. Yie, P. Osterberg, J. Gilbert, Stephen D. Senturia, Jacob K. White. A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures. In Michael R. Lightner, Jochen A. G. Jess, editors, Proceedings of the 1993 IEEE/ACM International Conference on Computer-Aided Design, 1993, Santa Clara, California, USA, November 7-11, 1993. pages 283-286, IEEE Computer Society, 1993. [doi]

@inproceedings{CaiYOGSW93,
  title = {A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures},
  author = {X. Cai and H. Yie and P. Osterberg and J. Gilbert and Stephen D. Senturia and Jacob K. White},
  year = {1993},
  doi = {10.1145/259794.259842},
  url = {http://doi.acm.org/10.1145/259794.259842},
  tags = {analysis},
  researchr = {https://researchr.org/publication/CaiYOGSW93},
  cites = {0},
  citedby = {0},
  pages = {283-286},
  booktitle = {Proceedings of the 1993 IEEE/ACM International Conference on Computer-Aided Design, 1993, Santa Clara, California, USA, November 7-11, 1993},
  editor = {Michael R. Lightner and Jochen A. G. Jess},
  publisher = {IEEE Computer Society},
  isbn = {0-8186-4490-7},
}