X. Cai, H. Yie, P. Osterberg, J. Gilbert, Stephen D. Senturia, Jacob K. White. A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures. In Michael R. Lightner, Jochen A. G. Jess, editors, Proceedings of the 1993 IEEE/ACM International Conference on Computer-Aided Design, 1993, Santa Clara, California, USA, November 7-11, 1993. pages 283-286, IEEE Computer Society, 1993. [doi]
Abstract is missing.