Sample Preparation methodology for ultra thin oxide damage in Metal-Insulator-Metal capacitors

Giancarlo Calvagno, Giuseppe Muni, Andrea Jossa, Domenico Mello. Sample Preparation methodology for ultra thin oxide damage in Metal-Insulator-Metal capacitors. Microelectronics Reliability, 52(9-10):2064-2067, 2012. [doi]

Authors

Giancarlo Calvagno

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Giuseppe Muni

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Andrea Jossa

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Domenico Mello

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