Sample Preparation methodology for ultra thin oxide damage in Metal-Insulator-Metal capacitors

Giancarlo Calvagno, Giuseppe Muni, Andrea Jossa, Domenico Mello. Sample Preparation methodology for ultra thin oxide damage in Metal-Insulator-Metal capacitors. Microelectronics Reliability, 52(9-10):2064-2067, 2012. [doi]

Abstract

Abstract is missing.