Giancarlo Calvagno, Giuseppe Muni, Andrea Jossa, Domenico Mello. Sample Preparation methodology for ultra thin oxide damage in Metal-Insulator-Metal capacitors. Microelectronics Reliability, 52(9-10):2064-2067, 2012. [doi]
@article{CalvagnoMJM12,
title = {Sample Preparation methodology for ultra thin oxide damage in Metal-Insulator-Metal capacitors},
author = {Giancarlo Calvagno and Giuseppe Muni and Andrea Jossa and Domenico Mello},
year = {2012},
doi = {10.1016/j.microrel.2012.06.128},
url = {http://dx.doi.org/10.1016/j.microrel.2012.06.128},
researchr = {https://researchr.org/publication/CalvagnoMJM12},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {52},
number = {9-10},
pages = {2064-2067},
}