Instantaneous de-embedding of the on-wafer equivalent-circuit parameters of acoustic resonator (FBAR) for integrated circuit applications

Humberto Campanella, Arantxa Uranga, Pascal Nouet, Pedro De Paco, Nuria Barniol, Jaume Esteve. Instantaneous de-embedding of the on-wafer equivalent-circuit parameters of acoustic resonator (FBAR) for integrated circuit applications. In Antonio Petraglia, Volnei A. Pedroni, Gert Cauwenberghs, editors, Proceedings of the 20th Annual Symposium on Integrated Circuits and Systems Design, SBCCI 2007, Copacabana, Rio de Janeiro, Brazil, September 3-6, 2007. pages 212-217, ACM, 2007. [doi]

Abstract

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