Embedded Model Control: Application to Interferometric Metrology Lines

Enrico S. Canuto, Fabio Musso. Embedded Model Control: Application to Interferometric Metrology Lines. In Proceedings of 11th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2006, September 20-22, 2006, Diplomat Hotel Prague, Czech Republic. pages 493-500, IEEE, 2006. [doi]

Abstract

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