Wafer Fab Management Optimization Using Simulation

G. Cardarelli, Pacifico Marcello Pelagagge. Wafer Fab Management Optimization Using Simulation. In Toshi Takamori, Kazuo Tsuchiya, editors, Robotics, Mechatronics and Manufacturing Systems. pages 657-662, Elsevier, 1993. [doi]

Abstract

Abstract is missing.