A. Castillejo, D. Veychard, Salvador Mir, Jean-Michel Karam, Bernard Courtois. Failure mechanisms and fault classes for CMOS-compatible microelectromechanical systems. In Proceedings IEEE International Test Conference 1998, Washington, DC, USA, October 18-22, 1998. pages 541-550, IEEE Computer Society, 1998. [doi]
Abstract is missing.