Novel algorithms for placement of rectangular covers for mask inspection in advanced lithography and other VLSI design applications - researchr publication authors

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Kanad Chakraborty, Alexey Lvov, Maharaj Mukherjee. Novel algorithms for placement of rectangular covers for mask inspection in advanced lithography and other VLSI design applications. IEEE Trans. on CAD of Integrated Circuits and Systems, 25(1):79-91, 2006. [doi]

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