Novel algorithms for placement of rectangular covers for mask inspection in advanced lithography and other VLSI design applications

Kanad Chakraborty, Alexey Lvov, Maharaj Mukherjee. Novel algorithms for placement of rectangular covers for mask inspection in advanced lithography and other VLSI design applications. IEEE Trans. on CAD of Integrated Circuits and Systems, 25(1):79-91, 2006. [doi]

@article{ChakrabortyLM06,
  title = {Novel algorithms for placement of rectangular covers for mask inspection in advanced lithography and other VLSI design applications},
  author = {Kanad Chakraborty and Alexey Lvov and Maharaj Mukherjee},
  year = {2006},
  doi = {10.1109/TCAD.2005.853710},
  url = {http://dx.doi.org/10.1109/TCAD.2005.853710},
  tags = {design},
  researchr = {https://researchr.org/publication/ChakrabortyLM06},
  cites = {0},
  citedby = {0},
  journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
  volume = {25},
  number = {1},
  pages = {79-91},
}