Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams

Edward K. Chan, Krishna Garikipati, Robert W. Dutton. Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams. IEEE Design & Test of Computers, 16(4):58-65, 1999. [doi]

Authors

Edward K. Chan

This author has not been identified. Look up 'Edward K. Chan' in Google

Krishna Garikipati

This author has not been identified. Look up 'Krishna Garikipati' in Google

Robert W. Dutton

This author has not been identified. Look up 'Robert W. Dutton' in Google