Edward K. Chan, Krishna Garikipati, Robert W. Dutton. Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams. IEEE Design & Test of Computers, 16(4):58-65, 1999. [doi]
@article{ChanGD99,
title = {Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams},
author = {Edward K. Chan and Krishna Garikipati and Robert W. Dutton},
year = {1999},
doi = {10.1109/54.808212},
url = {http://doi.ieeecomputersociety.org/10.1109/54.808212},
researchr = {https://researchr.org/publication/ChanGD99},
cites = {0},
citedby = {0},
journal = {IEEE Design & Test of Computers},
volume = {16},
number = {4},
pages = {58-65},
}