Hybrid bulk micro-machining process suitable for roughness reduction in optical MEMS devices

Arvind Chandrasekaran, Muthukumaran Packirisamy, Ion Stiharu, Andre Delage. Hybrid bulk micro-machining process suitable for roughness reduction in optical MEMS devices. IJMTM, 9(1/2):144-159, 2006. [doi]

Abstract

Abstract is missing.