Using a self-organizing neural network for wafer defect inspection

Chuan-Yu Chang, Jia-Wei Chang, MuDer Jeng. Using a self-organizing neural network for wafer defect inspection. In Proceedings of the IEEE International Conference on Systems, Man & Cybernetics: The Hague, Netherlands, 10-13 October 2004. pages 4312-4317, IEEE, 2004. [doi]

Authors

Chuan-Yu Chang

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Jia-Wei Chang

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MuDer Jeng

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