Using a self-organizing neural network for wafer defect inspection

Chuan-Yu Chang, Jia-Wei Chang, MuDer Jeng. Using a self-organizing neural network for wafer defect inspection. In Proceedings of the IEEE International Conference on Systems, Man & Cybernetics: The Hague, Netherlands, 10-13 October 2004. pages 4312-4317, IEEE, 2004. [doi]

@inproceedings{ChangCJ04,
  title = {Using a self-organizing neural network for wafer defect inspection},
  author = {Chuan-Yu Chang and Jia-Wei Chang and MuDer Jeng},
  year = {2004},
  doi = {10.1109/ICSMC.2004.1401209},
  url = {http://dx.doi.org/10.1109/ICSMC.2004.1401209},
  researchr = {https://researchr.org/publication/ChangCJ04},
  cites = {0},
  citedby = {0},
  pages = {4312-4317},
  booktitle = {Proceedings of the IEEE International Conference on Systems, Man & Cybernetics: The Hague, Netherlands, 10-13 October 2004},
  publisher = {IEEE},
  isbn = {0-7803-8566-7},
}