Multiple patterning layout decomposition considering complex coloring rules

Hua-Yu Chang, Iris Hui-Ru Jiang. Multiple patterning layout decomposition considering complex coloring rules. In Proceedings of the 53rd Annual Design Automation Conference, DAC 2016, Austin, TX, USA, June 5-9, 2016. pages 40, ACM, 2016. [doi]

Abstract

Abstract is missing.