Smooth indium zinc oxide film prepared by sputtering a In::2::O::3::: ZnO=95: 5 target

Shang-Chou Chang, Ming-Hua Shiao. Smooth indium zinc oxide film prepared by sputtering a In::2::O::3::: ZnO=95: 5 target. Microelectronics Journal, 38(12):1202-1206, 2007. [doi]

Abstract

Abstract is missing.