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Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor

Wenhan Chang, Lingmeng Yang, Zhezheng Zhu, Zhenchuan Yang, Yilong Hao, Chengchen Gao. Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor. Sensors, 21(13):4337, 2021. [doi]

Authors

Wenhan Chang

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Lingmeng Yang

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Zhezheng Zhu

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Zhenchuan Yang

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Yilong Hao

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Chengchen Gao

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