Wenhan Chang, Lingmeng Yang, Zhezheng Zhu, Zhenchuan Yang, Yilong Hao, Chengchen Gao. Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor. Sensors, 21(13):4337, 2021. [doi]
@article{ChangYZYHG21,
title = {Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor},
author = {Wenhan Chang and Lingmeng Yang and Zhezheng Zhu and Zhenchuan Yang and Yilong Hao and Chengchen Gao},
year = {2021},
doi = {10.3390/s21134337},
url = {https://doi.org/10.3390/s21134337},
researchr = {https://researchr.org/publication/ChangYZYHG21},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {21},
number = {13},
pages = {4337},
}