Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor

Wenhan Chang, Lingmeng Yang, Zhezheng Zhu, Zhenchuan Yang, Yilong Hao, Chengchen Gao. Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor. Sensors, 21(13):4337, 2021. [doi]

Abstract

Abstract is missing.