Electrically Induced Stimuli For MEMS Self-Test

BenoƮt Charlot, Salvador Mir, Fabien Parrain, Bernard Courtois. Electrically Induced Stimuli For MEMS Self-Test. In 19th IEEE VLSI Test Symposium (VTS 2001), Test and Diagnosis in a Nanometric World, 29 April - 3 May 2001, Marina Del Rey, CA, USA. pages 210-217, IEEE Computer Society, 2001. [doi]

Abstract

Abstract is missing.