Sandeep Singh Chauhan, Niharika J, M. M. Joglekar, S. K. Manhas. Fabrication of Molybdenum MEMs Structures Using Dry and Wet Etching. In S. Rajaram, N. B. Balamurugan, D. Gracia Nirmala Rani, Virendra Singh, editors, VLSI Design and Test - 22nd International Symposium, VDAT 2018, Madurai, India, June 28-30, 2018, Revised Selected Papers. Volume 892 of Communications in Computer and Information Science, pages 254-263, Springer, 2018. [doi]
@inproceedings{ChauhanJJM18,
title = {Fabrication of Molybdenum MEMs Structures Using Dry and Wet Etching},
author = {Sandeep Singh Chauhan and Niharika J and M. M. Joglekar and S. K. Manhas},
year = {2018},
doi = {10.1007/978-981-13-5950-7_22},
url = {https://doi.org/10.1007/978-981-13-5950-7_22},
researchr = {https://researchr.org/publication/ChauhanJJM18},
cites = {0},
citedby = {0},
pages = {254-263},
booktitle = {VLSI Design and Test - 22nd International Symposium, VDAT 2018, Madurai, India, June 28-30, 2018, Revised Selected Papers},
editor = {S. Rajaram and N. B. Balamurugan and D. Gracia Nirmala Rani and Virendra Singh},
volume = {892},
series = {Communications in Computer and Information Science},
publisher = {Springer},
isbn = {978-981-13-5950-7},
}