A Novel Wire-Density-Driven Full-Chip Routing System for CMP Variation Control

Huang-Yu Chen, Szu-Jui Chou, Sheng-Lung Wang, Yao-Wen Chang. A Novel Wire-Density-Driven Full-Chip Routing System for CMP Variation Control. IEEE Trans. on CAD of Integrated Circuits and Systems, 28(2):193-206, 2009. [doi]

Abstract

Abstract is missing.