Min Chen, Hao Chen, Jinlin Wang, Limei Xu. Numerical simulation of force-balance MEMS comb accelerometers. In 2011 IEEE International Conference on Robotics and Biomimetics, ROBIO 2011, Karon Beach, Thailand, December 7-11, 2011. pages 1200-1205, IEEE, 2011. [doi]
Abstract is missing.