Analysis of the self-test characteristics of a micromachined accelerometer

Weiping Chen, Xiaoliang Chen, Guoguang Zheng, Xiaowei Liu, Haifeng Zhang. Analysis of the self-test characteristics of a micromachined accelerometer. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 396-399, IEEE, 2009. [doi]

Authors

Weiping Chen

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Xiaoliang Chen

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Guoguang Zheng

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Xiaowei Liu

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Haifeng Zhang

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