Weiping Chen, Xiaoliang Chen, Guoguang Zheng, Xiaowei Liu, Haifeng Zhang. Analysis of the self-test characteristics of a micromachined accelerometer. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 396-399, IEEE, 2009. [doi]
Abstract is missing.