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A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy

Shuo Chen, Liuhaodong Feng, Song Guo, Yucheng Ji, Shuwen Zeng, Xinlin Peng, Yang Xu, Tianbao Hu, Zhenyu Wu, Shinan Wang. A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy. Sensors, 23(3):1276, February 2023. [doi]

Authors

Shuo Chen

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Liuhaodong Feng

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Song Guo

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Yucheng Ji

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Shuwen Zeng

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Xinlin Peng

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Yang Xu

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Tianbao Hu

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Zhenyu Wu

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Shinan Wang

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